ASML is the only commercial supplier of machines using what extreme lithography technology?
Answer
EUV lithography
Answer
EUV lithography
ASML is the only commercial supplier of machines using extreme ultraviolet, or EUV, lithography.
EUV lithography uses light with a wavelength of about 13.5 nanometers to project extremely small circuit patterns onto silicon wafers. The shorter wavelength allows chip manufacturers to print finer features than older deep ultraviolet systems can manage efficiently for the most advanced layers.
EUV machines are exceptionally complex. They generate EUV light by striking tiny droplets of molten tin with laser pulses, and the light must travel through a near-vacuum because it is absorbed by ordinary air and glass. Specialized mirrors guide the light because conventional lenses cannot be used.
ASML is based in Veldhoven, Netherlands, and its machines are assembled with components from a large international supplier network. Nikon and Canon also make lithography equipment, especially for other process technologies, but they are not commercial suppliers of EUV systems. ASML's technological position has made it one of Europe's most valuable public companies.
Source: Wikipedia · fact-checked Oct. 2026